| 发明名称 |
Time Differential Reticle Inspection |
| 摘要 |
Disclosed are systems and methods for time differential reticle inspection. Contamination is detected by, for example, determining a difference between a first signature of at least a portion of a reticle and a second signature, produced subsequent to the first signature, of the portion of the reticle. |
| 申请公布号 |
US2012171600(A1) |
申请公布日期 |
2012.07.05 |
| 申请号 |
US201013378811 |
申请日期 |
2010.07.16 |
| 申请人 |
CATEY ERIC BRIAN;HARNED NORA-JEAN;SHMAREV YEVGENIY KONSTANTINOVICH;THARALDSEN ROBERT ALBERT;JACOBS RICHARD DAVID;ASML HOLDING N.V. |
发明人 |
CATEY ERIC BRIAN;HARNED NORA-JEAN;SHMAREV YEVGENIY KONSTANTINOVICH;THARALDSEN ROBERT ALBERT;JACOBS RICHARD DAVID |
| 分类号 |
G03F7/20;G01N21/00;G03F1/00 |
主分类号 |
G03F7/20 |
| 代理机构 |
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