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发明名称
CLEANING METHOD FOR DUV OPTICAL ELEMENTS TO EXTEND THEIR LIFETIME
摘要
申请公布号
EP2185298(B1)
申请公布日期
2012.07.04
申请号
EP20080794669
申请日期
2008.07.23
申请人
CORNING INCORPORATED
发明人
CANGEMI, MICHAEL, J.;FENG, JIANGWEI;HAYDEN, CINDY, J.;SABIA, ROBERT;SCHREIBER, HORST;WANG, JUE
分类号
B08B3/12;B08B7/00;C30B33/00
主分类号
B08B3/12
代理机构
代理人
主权项
地址
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