| 摘要 |
A drive frequency tunable MEMS sensor in one embodiment includes a mass, a mass drive component configured to drive the mass within a plane, a plurality of non-linear springs supporting the mass a first tuner operably connected to the plurality of non-linear springs for modifying the stress condition of the plurality of non-linear springs in response to a trim voltage, and a trim circuit electrically coupled with the first tuner for providing the trim voltage. |
