发明名称 |
Bistable nanoswitch |
摘要 |
A non-volatile bistable nano-electromechanical switch is provided for use in memory devices and microprocessors. The switch employs carbon nanotubes as the actuation element. A method has been developed for fabricating nanoswitches having one single-walled carbon nanotube as the actuator. The actuation of two different states can be achieved using the same low voltage for each state.
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申请公布号 |
US8211765(B2) |
申请公布日期 |
2012.07.03 |
申请号 |
US201113228701 |
申请日期 |
2011.09.09 |
申请人 |
SOMU SIVASUBRAMANIAN;BUSNAINA AHMED;MCGRUER NICOL;RYAN PETER;ADAMS GEORGE G.;XIONG XUGANG;KIM TAEHOON;NORTHEASTERN UNIVERSITY |
发明人 |
SOMU SIVASUBRAMANIAN;BUSNAINA AHMED;MCGRUER NICOL;RYAN PETER;ADAMS GEORGE G.;XIONG XUGANG;KIM TAEHOON |
分类号 |
H01L21/336;H01L21/8238;H01L51/40 |
主分类号 |
H01L21/336 |
代理机构 |
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代理人 |
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地址 |
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