| 摘要 |
PURPOSE: An improved vibration sensing device, a nozzle device having the same, and a coating device are provided to prevent a flexure caused by the weight of a vibration bar because the vibration bar is fixed and mounted on a lateral side a first rip and/or second rip of a nozzle device or a project bar. CONSTITUTION: An improved vibration sensing device(270) comprises a vibration bar(271) and vibration sensor members(272,272a,272b). The vibration bar is fixed and mounted on one lateral side of a first rip(232) and/or a second rip(234) of a nozzle device(230) by a plurality of joining members(274a,274b,282) or a project bar(250). The vibration sensor members are composed of connection members and vibration members(275a,275b). The connection member is fixed and mounted in the vibration bar. The vibration sensors are arranged in the connection members. The vibration members sense vibration of the vibration bars.
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