APPARATUS FOR BETA-BATTERY AND METHOD OF MAKING SAME

摘要

PURPOSE: A manufacturing method of a beta battery is provided to improve the efficiency per unit area with respect to the number of laminated PN joint, and to have a simple process in comparison with a pore-forming process using DRIE(deep reactive ion etching). CONSTITUTION: A manufacturing method of a beta battery: a step of forming an oxide mask(22) in which a predetermined pattern is formed on one side of a substrate(21); a step of forming a plurality of grooves by etching the region in which the oxide mask is not spread; a step of removing the oxide mask, and forming a PN joint layer on the substrate; a step of forming a first electrode on the PN joint layer, and a step of forming a second electrode on the other side of the substrate; and a step of forming a unit module by laminating a radioisotope layer emitting beta rays on the radioisotope layer of the PN joint layer.