SUBSTRATE WITH TRANSPARENT CONDUCTIVE FILM

摘要

PROBLEM TO BE SOLVED: To provide a substrate with a transparent conductive film, which has an irregular shape effective in high optical confinement in a wavelength region absorbed by a photoelectric conversion layer of a solar cell and also has a low resistance performance and a high transmittance performance.

SOLUTION: The substrate with a transparent conductive film includes a substrate and an oxide thin film formed on the substrate. The transparent conductive film includes a first transparent oxide thin film and a second transparent oxide thin film in this order from the substrate side, wherein the first and second transparent oxide thin films have crystal structures different from each other. An angle formed between the substrate and a surface of crystal grain of the first transparent oxide thin film is different from an angle formed between the substrate and a surface of crystal grain of the second transparent oxide thin film.

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