LIQUID-REPELLENT TREATMENT COMPOSITION FOR IMMERSION EXPOSURE APPARATUS, LIQUID-REPELLENT TREATMENT METHOD FOR IMMERSION EXPOSURE APPARATUS, LIQUID-REPELLENT TREATMENT COMPOSITION SET FOR IMMERSION EXPOSURE APPARATUS, AND LIQUID-REPELLENT TREATMENT METHOD FOR IMMERSION EXPOSURE APPARATUS USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a liquid-repellent treatment composition for an immersion exposure apparatus and a liquid-repellent treatment method to form a liquid-repellent treated layer with excellent adhesion.

SOLUTION: This composition is for liquid-repellent treatment of surfaces of components in an immersion exposure apparatus which irradiates an exposure beam to expose a base material to light via a liquid, and at least contains an organosilicon compound represented by the general formula (1) and a solvent. In the formula, R1represents a monovalent organic group with the carbon number 14-30, and each of R2, R3and R4independently represents a monovalent organic group or hydrolyzable group with the carbon number 1-10, where at least one of R2, R3and R4is a hydrolyzable group.

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