METHODS AND APPARATUS FOR RECOVERY AND REUSE OF REAGENTS
摘要
Methods and apparatus for recovery and reuse of reagents are provided herein. In some embodiments, a system for processing substrates may include a process chamber for processing a substrate; a reagent source coupled to the process chamber to provide a reagent to the process chamber; and a reagent recovery system to collect, and at least one of purify or concentrate the reagent recovered from an effluent exhausted from the process chamber. In some embodiments, a method for recovering unreacted reagent may include providing reagent from a reagent source to a process chamber; exposing a substrate disposed in the process chamber to the reagent, forming an effluent; exhausting the effluent from the process chamber; and recovering unreacted reagent from the effluent in a reagent recovery system.
申请公布号
WO2012054379(A3)
申请公布日期
2012.06.28
申请号
WO2011US56530
申请日期
2011.10.17
申请人
APPLIED MATERIALS, INC.;KIEFER, MICHAEL;NEUBER, ANDREAS;DAVID, DENIS;CLARK, DANIEL O.;CHANDLER, PHIL
发明人
KIEFER, MICHAEL;NEUBER, ANDREAS;DAVID, DENIS;CLARK, DANIEL O.;CHANDLER, PHIL