发明名称 |
METHOD OF MANUFACTURING OPTICAL WAVEGUIDE |
摘要 |
A method of manufacturing an optical waveguide is provided which enables a recognition device such as a CCD camera to easily recognize an alignment mark for positioning a mold for over cladding layer formation. The method includes the steps of: forming protruding cores and a protruding alignment mark on an upper surface of an under cladding layer on a substrate by a photolithographic method; and forming the over cladding layer by use of the mold positioned using the alignment mark as a guide. For the formation of the alignment mark, a photomask is used which has an opening pattern for alignment mark formation including an opening, and a light transmission amount reduction region provided around the opening and having an aperture ratio within a range greater than 10% and less than 80%. The alignment mark is formed to have a peripheral side surface in the form of an inclined surface. |
申请公布号 |
US2012164313(A1) |
申请公布日期 |
2012.06.28 |
申请号 |
US201113311938 |
申请日期 |
2011.12.06 |
申请人 |
SHIBATA NAOKI;NAITO RYUSUKE;MIZUTANI TORU;NITTO DENKO CORPORATION |
发明人 |
SHIBATA NAOKI;NAITO RYUSUKE;MIZUTANI TORU |
分类号 |
C23C16/52 |
主分类号 |
C23C16/52 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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