发明名称 PHOTOSENSITIVE RESIN COMPOSITION
摘要 <p>A photosensitive resin composition which comprises (A) an alkali-soluble polymer, (B) a photopolymerization initiator, and (C) a compound having an ethylenically unsaturated double bond, wherein the photopolymerization initiator (B) is a 2,4,5-triarylimidazole dimer or an acridine compound, while a compound represented by general formula (I) is contained as the compound (C). In general formula (I), R1, R2, A, B, n1, n2 and n3 are each as defined in the description. The photosensitive resin composition is excellently and stably dispersible in a developer to minimize the generation of an aggregate. Further, the resin composition exhibits proper developability and can provide a flexible cured resist with good etching resistance.</p>
申请公布号 WO2012086371(A1) 申请公布日期 2012.06.28
申请号 WO2011JP77415 申请日期 2011.11.28
申请人 ASAHI KASEI E-MATERIALS CORPORATION;KUNIMATSU, SHINICHI;TSUTSUI, YAMATO;NAITO, KAZUYA 发明人 KUNIMATSU, SHINICHI;TSUTSUI, YAMATO;NAITO, KAZUYA
分类号 G03F7/027;C08F2/50;C08F20/26;C08F290/06;H05K3/06 主分类号 G03F7/027
代理机构 代理人
主权项
地址