发明名称 SUBSTRATE TREATING APPARATUS AND STORING UNIT
摘要 PURPOSE: A solar cell module and a method of manufacturing the same are provided to reduce the installation area of a substrate processing apparatus by supporting a chamber with a door moving between a close position and an opening position. CONSTITUTION: In a solar cell module and a method of manufacturing the same, a chamber has a space accommodating a substrate. A frame(210) has an internal space receiving the chamber. A guide rail(251) is moved between an opening position and a closing position. The guide rail includes a door opening and closing one open side of the frame and guides the chamber in the frame when the chamber is moved outside.
申请公布号 KR101160167(B1) 申请公布日期 2012.06.28
申请号 KR20100001751 申请日期 2010.01.08
申请人 发明人
分类号 H01L21/683;H01L21/00 主分类号 H01L21/683
代理机构 代理人
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