Particle beam system for recording of energy loss spectrum, has high voltage source for providing high voltage between two high voltage outputs and control signal

摘要

The particle beam system (1) has a high voltage source (21) for providing a high voltage between two high voltage outputs (23,24) and a control signal, which represents a deviation of the supplied high voltage from a desired voltage or a temporal variation of the high voltage at a control output (51). A detector (43) is arranged in a light path dispersive behind a component (37). A controller (27) is connected with the control output. An independent claim is also included for a spectroscopy method for recording of energy loss spectrum.