发明名称 |
A RESONATOR INCLUDING A PASSIVATION LAYER, A VIBRATING SENSOR INCLUDING SUCH A RESONATOR, AND A METHOD OF MANUFACTURE |
摘要 |
A resonator has a body of silicon-based material with at least one resonant part having at least one portion covered in an electrical conduction layer and at least one portion not covered in a conduction layer. The portion of the resonator not covered in a conduction layer is covered in a passivation layer in such a manner that, in the resonant part, the silicon-based material is completely covered by the conduction layer and by the passivation layer in combination. A vibrating sensor is also provided which includes such a resonator and a method of fabricating the resonator. |
申请公布号 |
KR20120069760(A) |
申请公布日期 |
2012.06.28 |
申请号 |
KR20127012139 |
申请日期 |
2010.11.10 |
申请人 |
SAGEM DEFENSE SECURITE S.A |
发明人 |
VANDEBEUQUE PAUL |
分类号 |
G01C19/5691;G01C19/56 |
主分类号 |
G01C19/5691 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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