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经营范围
发明名称
Lithographischer Projektionsapparat
摘要
申请公布号
DE60127212(D1)
申请公布日期
2007.04.26
申请号
DE20016027212
申请日期
2001.08.31
申请人
KONINKLIJKE PHILIPS ELECTRONICS N.V.;ASML NETHERLANDS B.V.
发明人
BANINE, VADIM YEVGENYEVICH;JONKERS, JEROEN
分类号
G03F7/20;G03F7/22;H01L21/027
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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