| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a scanning type electron microscope capable of observing an observation target as it is without processing it. <P>SOLUTION: A seal member contacting an observation target is provided at a tip of an opening of a lens barrel, and the observation target is adsorbed to the lens barrel via the seal member when the lens barrel is vacuumed by a vacuum pump, and the lens barrel is tightly fixed while directly contacting the observation target. That is to say, the observation target and the lens barrel are tightly fixed to each other by adsorption without relatively moving, because a sample chamber is not provided. Thus, although the sample chamber is not provided, the lens barrel can be maintained under a vacuum condition, and the lens barrel and the observation target do not relatively move due to vibrations, and therefore, bad influences are not given during observation. In this manner, the lens barrel is directly mounted to the observation target, and therefore, even the observation target that cannot be housed in the sample chamber of a conventional electron microscope can be observed as it is without processing it. <P>COPYRIGHT: (C)2012,JPO&INPIT |
