MICROFLUIDIC DEVICE WITH FLUID FLOW CONTROL MEANS

摘要

The invention relates to a component (200) and a method for manufacturing a MEMS device, particularly a microfluidic device. The component (200) comprises at least one metal track (120) on an assistant layer (110) of a removable metal. The track (120) is embedded in a substrate layer (210) of a thermoplastic material. The assistant layer (110) can later be removed, and a microfluidic component can be built upon the thus exposed surface.