Beam direction sensor and method for determining the angle of incidence of a beam source

摘要

The sensor (1) has a diode arrangement (5) comprising Avalanche-photodiodes (4) representing a position-sensitive detector (3), where the arrangement is arranged in a semiconductor layer (6). An application-specific integrated circuit generates linearly-evaluated analog output signals. A transparent layer i.e. distance layer (8), adjusts defined distance between the semiconductor layer and a cover structure. The structure is arranged on the distance layer and designed as a defined opening in a non-transparent layer. A connection unit electrically connects the sensor to a semiconductor chip. An independent claim is also included for a method for determining incident angle of a radiation source.