| 摘要 |
A gas distribution apparatus (80), comprising: a distribution manifold (82) in fluid communication with a gas source and a plurality of injection nozzles (60) such injection nozzles (60) comprising a tube (62) with a fluid inlet (64), a fluid outlet (66), an inner diameter and an axial length; wherein the fluid inlet (64) of at least one of the plurality of injection nozzles (60) is disposed within the distribution manifold (82) and a fluid outlet; wherein the inlet (64) of the at least one of the injection nozzles (60) comprises an annular orifice (68) surrounding a flow restriction device (70, 70C, 70F); and wherein the fluid outlet (66) is external to an outer circumference (89) of the distribution manifold (82). |
