APPARATUS AND METHOD FOR MANUFACTURING FINE PATTERN CAPABLE OF INTEROGRAM DIRECTION SWITCHING

摘要

PURPOSE: An apparatus and method for manufacturing a fine pattern capable of changing a polarized light inference pattern direction in a laser scanning mode are provided to manufacture a fine pattern whose line width is reduced by using the interference of polarized light. CONSTITUTION: A polarizing plate polarizes laser light into a S(Secondary) wave and a P(Primary) wave whose polarization directions are vertical. A birefringence plate refracts one of the S wave and the P wave in a specific direction. An analyzer matches the polarization direction of the S wave and the P wave in which a route is divided by the birefringence plate. An exposure lens(110) transmits light in which the polarization direction is matched with and scans the light on a coated sensitive film on a substrate. The polarizing plate, the birefringence plate, the analyzer, and the exposure lens are installed inside an exposure head. An X-stage(120) transfers the exposure head in an X-axis direction. A rotational stage(140) rotates a substrate installation part around a vertical Z-axis.