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发明名称
СПОСОБ ИЗМЕРЕНИЯ УДЕЛЬНОГО КОНТАКТНОГО СОПРОТИВЛЕНИЯ
摘要
申请公布号
RU1284430(C)
申请公布日期
2012.06.27
申请号
SU19853877689
申请日期
1985.04.04
申请人
Физико-технический институт АН БССР
发明人
Гурский Л.И.;Бобченок Ю.Л.;Зеленин В.А.;Автюшков Е.В.
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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