| 发明名称 |
LITHOGRAPHIC APPARATUS AND REMOVABLE MEMBER. |
| 摘要 |
A lithographic apparatus arranged to transfer a pattern from a patterning device onto a substrate, the lithographic apparatus having a first object and a planar member mounted on the first object to improve thermal transfer to/from a second object. |
| 申请公布号 |
NL2007834(A) |
申请公布日期 |
2012.06.27 |
| 申请号 |
NL20112007834 |
申请日期 |
2011.11.22 |
| 申请人 |
ASML NETHERLANDS B.V. |
发明人 |
BEERENS, RUUD;CADEE, THEODORUS |
| 分类号 |
G03F7/20 |
主分类号 |
G03F7/20 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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