GRAPHENE ELECTRONIC DEVICE AND METHOD OF FABRICATING THE SAME

摘要

PURPOSE: A graphene electronic device and a manufacturing method thereof are provided to maintain a property of a graphene channel layer without damage by forming gate oxide, in other word, a protective layer on graphene. CONSTITUTION: A graphene channel layer is arranged on the top of a substrate. A source electrode(130) and a drain electrode(140) are formed on both ends of a graphene channel layer(120). A gate oxide(150) is formed between the source electrode and the drain electrode on the graphene channel layer. The gate electrode is arranged on the gate oxide. The gate oxide is formed to be substantially identical to a shape of a channel layer between the source electrode and the drain electrode.