| 摘要 |
PURPOSE: A resonator of a hybrid laser diode is provided to minimize the effect of a surface bonding by widening the width of the compound semiconductor waveguide of the resonator. CONSTITUTION: A substrate includes a semiconductor layer in which a waveguide for a hybrid(120h), a multiple mode waveguide(122), and a single mode waveguide(126) are serially connected. A compound semiconductor waveguide(210) is arranged on the waveguide for the hybrid of the semiconductor layer. A tapered coupling structure(210t), which is overlapped with a part of the multiple mode waveguide, is formed on one end of the compound semiconductor waveguide. A reflective unit(128) is arranged on one end of the single mode waveguide. |
