发明名称 |
Advanced mixing method for integrated tool having site-isolated reactors |
摘要 |
An integrated processing tool is described comprising a full-wafer processing module and a combinatorial processing module. Chemicals for use in the combinatorial processing module are fed from a delivery system including a set of first manifolds. An output of each first manifold is coupled to at least one mixing vessel. An output of each mixing vessel feeds more than one of a set of second manifolds. An output of each set of second manifolds feeds one of multiple site-isolated reactors of the combinatorial processing module.
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申请公布号 |
US8207069(B2) |
申请公布日期 |
2012.06.26 |
申请号 |
US201113189894 |
申请日期 |
2011.07.25 |
申请人 |
WEINER KURT H.;CHIANG TONY P.;FRANCIS AARON;SCHMIDT JOHN;INTERMOLECULAR, INC. |
发明人 |
WEINER KURT H.;CHIANG TONY P.;FRANCIS AARON;SCHMIDT JOHN |
分类号 |
H01L21/00;C40B50/00;C40B60/00;H01L21/306 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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