| 摘要 |
PURPOSE: A method for controlling correction equipment is provided to improve the production efficiency by preventing the halting of the entire equipment during restoration of partial facility of the correction equipment. CONSTITUTION: A method for controlling correction equipment is as follows. A malfunction of each correction facility is detected(S10). The availability of individual driving of the detected correction facility is determined(S20). The corresponding correction facility is set to an individual operating mode according to the determination result(S40). |
