发明名称 SECURING MECHANISM AND METHOD FOR WAFER BONDER
摘要 Disclosed are various features associated with a securing mechanism for a wafer bonder. In certain situations, operation of securing mechanisms can generate undesirable particles and debris, and some them can be introduced to a wafer being bonded. In certain implementations, a securing mechanism can be configured to reduce the likelihood of such particles and debris being introduced to the wafer.
申请公布号 WO2012047810(A3) 申请公布日期 2012.06.21
申请号 WO2011US54632 申请日期 2011.10.03
申请人 SKYWORKS SOLUTIONS, INC.;CANALE, STEVE;ZAPP, DAVID, J. 发明人 CANALE, STEVE;ZAPP, DAVID, J.
分类号 H01L21/50;H01L21/683 主分类号 H01L21/50
代理机构 代理人
主权项
地址