| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a carrying device for carrying a plate-shaped member while canceling hanging of a peripheral part thereof when the plate-shaped member is carried. <P>SOLUTION: The carrying device 10 includes an articulated robot equipped with a chucking arm 14 for a wafer W at the leading edge. When the chucking arm 14 is sagged and the wafer W is hung by weight caused by holding the wafer W, the carrying device 10 is configured to adjust an angle of the chucking arm 14 to cancel an amount of hanging in the peripheral part of the wafer W and an amount of displacement in a direction of a reference line L to hold the wafer W in a substantially horizontal attitude. The amount of hanging of the wafer W can be found by measuring a length by first and second length measuring machines 40 and 41. <P>COPYRIGHT: (C)2012,JPO&INPIT |
