发明名称 |
SCANNING ELECTRON MICROSCOPE AND SAMPLE OBSERVATION METHOD |
摘要 |
A scanning electron microscope of the present invention performs scanning by changing a scanning line density in accordance with a sample when an image of a scanned region is formed by scanning a two-dimensional region on the sample with an electron beam or is provided with a GUI having sample information input means which inputs information relating to the sample and display means which displays a recommended scanning condition according to the input and performs scanning with a scanning line density according to the sample by selecting the recommended scanning condition. As a result, in observation using a scanning electron microscope, a suitable scanning device which can improve contrast of a profile of a two-dimensional pattern and suppress shading by suppressing the influence of charging caused by primary charged particle radiation and by improving a detection rate of secondary electrons and a scanning method are provided.
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申请公布号 |
US2012153145(A1) |
申请公布日期 |
2012.06.21 |
申请号 |
US201013387183 |
申请日期 |
2010.07.30 |
申请人 |
CHENG ZHAOHUI;KOYAMA HIKARU;KIMURA YOSHINOBU;SHINADA HIROYUKI;KOMURO OSAMU;HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
CHENG ZHAOHUI;KOYAMA HIKARU;KIMURA YOSHINOBU;SHINADA HIROYUKI;KOMURO OSAMU |
分类号 |
H01J37/28 |
主分类号 |
H01J37/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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