| 摘要 |
<P>PROBLEM TO BE SOLVED: To inhibit outside air from reaching the surface of a window part when stopping supply of a liquid between the window part through which a beam of the inspection light for measuring thickness is transmitted and a workpiece. <P>SOLUTION: When measuring the thickness, water W is supplied from a liquid source 51 in a second case 42, and a liquid cushion W1 is formed between the window part 412 of the first case 41 and the workpiece 1. The inspection light beam emitted from a light emitting/receiving part 43 of a non-contact measuring means 40 is emitted to the workpiece 1 through the window part 412 and the liquid cushion W1. When the measurement of the thickness is finished and the supply of water W from the liquid source 51 to the second case 42 is stopped, the air is supplied from a gaseous source 52 to the second case 42 to make the window part 412 undergo an air blow and the outside air is hindered from flowing in the second case 42. <P>COPYRIGHT: (C)2012,JPO&INPIT |
