发明名称 Optical Displacement Meter
摘要 Provided is an optical displacement meter capable of accurately detecting a displacement of an object. A light-projecting part selectively irradiates a workpiece with first and second light whose polarization directions are different from each other. Reflected light from the workpiece is incident on a light-receiving element through a light-receiving lens. A waveform creating part creates first and second waveform data showing light-receiving amount distributions of the first and second light obtained by the light-receiving element. A waveform processing part calculates a ratio between mutually corresponding peaks in the first and second waveform data, and selects one peak from each of the first and second waveform data based on the calculated ratios, to detect a position of the peak.
申请公布号 US2012154807(A1) 申请公布日期 2012.06.21
申请号 US201113304749 申请日期 2011.11.28
申请人 USAMI JUN;KEYENCE CORPORATION 发明人 USAMI JUN
分类号 G01B11/14 主分类号 G01B11/14
代理机构 代理人
主权项
地址