MANUFACTURING METHOD OF AN ARRAY SUBSTRATE FOR LIQUID CRYSTAL DISPLAY

摘要

PURPOSE: A method for manufacturing an array substrate for LCD is provided to increase process margin and to remove the residue of a metal film by increasing etching rate. CONSTITUTION: A copper-based metal film is formed on a substrate. The copper-based metal film is formed on a gate line by etching the copper-based metal film as etchant composition. A semiconductor layer is formed on a gate insulating layer. Source and drain electrodes are formed on the semiconductor layer. A pixel electrode is formed to the drain electrode.