MANUFACTURING METHOD OF AN ARRAY SUBSTRATE FOR LIQUID CRYSTAL DISPLAY

摘要

PURPOSE: An array substrate manufacturing method for LCD is provided to increase etch uniformity and linearity and to implement a low taper profile when etching a copper-based metal film. CONSTITUTION: A copper metal film is formed on a substrate. The copper metal film is etched as etchant composites and is formed on a gate line. The copper metal film is formed on a semiconductor layer. The copper metal film is etched as the etchant composites and is formed on source and drain electrodes. A photoreaction material selectively remains on the copper metal film. The copper metal film is etched through the etchant composites.