| 摘要 |
PROBLEM TO BE SOLVED: To provide a length measurement device and length measurement method of high measurement accuracy that are applicable for measuring the size of a fine measuring object and do not cause fluctuation of the measured values by a worker. SOLUTION: A single crystal sample 20 whose crystal lattice interval is known is mounted on a sample mounting section 16, and a crystal lattice image is acquired by a STEM detector 17 and an image analysis section 18. The image analysis section 18 Fourier-transforms the crystal lattice image to acquire a diffraction spot image, and corrects the magnification, aspect ratio, and distortion of the image so that the position of the diffraction spot of the diffraction spot image matches with the position of a theoretical diffraction spot. Then, the diffraction spot image after the correction is inversely Fourier-transformed into an image of the real space, the scale is converted into an inverse number, and it is set as a scale of the real space. COPYRIGHT: (C)2008,JPO&INPIT |
