Method for determining contamination of material using mid-ir spectroscopy

摘要

A method of determining contamination on a material having suspected contamination includes irradiating the material having suspected contamination with infrared energy over a spectrum of wavelengths; detecting the infrared energy reflected from the material having suspected contamination over the spectrum of wavelengths; performing multivariate analysis on the spectrum of the reflected infrared energy; comparing results of the multivariate analysis with a predetermined calibration of infrared energy spectra comprising the spectrum of wavelengths collected from at least one reference material; and determining presence or absence of contamination on the material having suspected contamination based on the predetermined calibration.