发明名称 |
Template derivative for forming ultra-low dielectric layer and method of forming ultra-low dielectric layer using the same |
摘要 |
A reactive cyclodextrin derivative or a reactive glucose derivative is used as a template derivative for forming an ultra-low dielectric layer. A layer is formed of the reactive cyclodextrin derivative or the reactive glucose derivative capped with Si—H and then cured in an atmosphere of hydrogen peroxide to form the ultra-low dielectric layer. |
申请公布号 |
US8202807(B2) |
申请公布日期 |
2012.06.19 |
申请号 |
US20070964950 |
申请日期 |
2007.12.27 |
申请人 |
MIN SUNG KYU;KU JA CHUN;KIM CHAN BAE;AHN SANG TAE;CHUNG CHAI O;AN HYEON JU;LEE HYO SEOK;KIM EUN JEONG;HYNIX SEMICONDUCTOR INC. |
发明人 |
MIN SUNG KYU;KU JA CHUN;KIM CHAN BAE;AHN SANG TAE;CHUNG CHAI O;AN HYEON JU;LEE HYO SEOK;KIM EUN JEONG |
分类号 |
H01L21/31 |
主分类号 |
H01L21/31 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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