| 摘要 |
The invention relates to piezoelectric sensor arrangements, especially sensor arrangements that can be operated in a measuring fluid, in order to be able to detect, for example, elastic properties of the measuring fluid itself or the presence and/or concentration of analyte molecules in the fluid. According to the invention, the sensor arrangement comprises an acoustic resonator which has a sensitive region and is arranged such that a resonance frequency of the sensor arrangement varies according to properties of the measuring fluid. The acoustic resonator is formed by a piezoelectric thin layer resonator and the sensitive region is produced by means of epitaxy, such that transversally polarized vibration modes can be induced. |
