SUBSTRATE TRANSFER UNIT AND INSPECTING APPARATUS USING THE SAME

摘要

PURPOSE: A substrate transportation unit and a substrate inspection device using the same are provided to improve accuracy of substrate inspection by minimizing vibration of a substrate generated by a transferring roller. CONSTITUTION: A substrate transportation unit(110) comprises a rotary shaft(112) and a transferring roller(113). A rotary shaft is installed to a frame and a top check module(130) which can be rotated. The transferring roller is installed to the rotary shaft at constant intervals and is contacted to a substrate. A driving source(124) and a power transmission means(125) transfers torque to the rotary shaft. The top check module comprises a top inspection camera(131) and a top review camera(132). The top inspection camera is installed at a camera support stand(133). The top review camera precisely inspects a defect doubt region of the upper side of the substrate.