发明名称 |
RESIST COMPOSITION, METHOD OF FORMING RESIST PATTERN, AND NEW COMPOUND |
摘要 |
<p>PURPOSE: A resist composition, a method for forming resist patterns, and noble compounds are provided to improve the rectangularity and the resolution of the resist patterns. CONSTITUTION: A resist composition includes a base material, a nitrogen-containing organic compound, and an acid generating agent. The acid generating agent generates acid by exposure. The dissolution of the base material to a developing solution is changed by the action of acid. The nitrogen-containing organic compound contains a compound represented by chemical formula 1. The acid generating agent excludes the compound represented by chemical formula 1. In chemical formula 1, RN is nitrogen-containing heterocyclic group with/without a substituted group; X0 is a C1 to C10 linear or branched divalent aliphatic hydrocarbon group, a C3 to C20 cyclic or partially cyclic divalent aliphatic hydrocarbon group, or a group in which a part or whole of hydrogen atoms of the preceding hydrocarbon groups is substituted with fluorine atoms; and M^+ is organic cation.</p> |
申请公布号 |
KR20120064028(A) |
申请公布日期 |
2012.06.18 |
申请号 |
KR20110128393 |
申请日期 |
2011.12.02 |
申请人 |
TOKYO OHKA KOGYO CO., LTD. |
发明人 |
UTSUMI YOSHIYUKI;MIYASHITA KENICHIRO;KAWAUE AKIYA |
分类号 |
G03F7/004;G03F7/00;G03F7/039 |
主分类号 |
G03F7/004 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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