APPARATUS FOR TRANSFERRING SUBSTRATE

摘要

PURPOSE: A substrate transport apparatus is provided to reduce time to be required in order to execute a loading process and an unloading process by reducing migration distance of a substrate. CONSTITUTION: A main body comprises an arm mechanism for transferring a substrate. A supporting mechanism(20) is combined with the main body and supports the arm mechanism. A rotary unit(30) is combined with the supporting mechanism and rotates the arm mechanism. The rotary unit comprises a mobile unit(40), a rotary mechanism(50), and an inserting member(60). The mobile unit straightly transfers the inserting member. The rotary mechanism is combined with the supporting mechanism which can be rotated. The inserting member is inserted into a cam groove. The cam groove is formed in a cam member.