发明名称 |
IN-SITU DEPOSITION OF BATTERY ACTIVE LITHIUM MATERIALS BY THERMAL SPRAYING |
摘要 |
A method and apparatus for forming an electrochemical layer of a thin film battery is provided. A precursor mixture comprising precursor particles dispersed in a carrying medium is activated in an activation chamber by application of an electric field to ionize at least a portion of the precursor mixture. The activated precursor mixture is then mixed with a combustible gas mixture to add thermal energy to the precursor particles, converting them to nanocrystals, which deposit on a substrate. A second precursor may be blended with the nanocrystals as they deposit on the surface to enhance adhesion and conductivity. |
申请公布号 |
KR20120063495(A) |
申请公布日期 |
2012.06.15 |
申请号 |
KR20127007598 |
申请日期 |
2010.08.24 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
SHANG QUANYUAN;YANG LU;BROWN KARL M.;OLGADO DONALD J. K.;PEBENITO VICTOR;BOLANDI HOOMAN;ISHIKAWA TETSUYA;BACHRACH ROBERT Z.;CHEN LIANG YUH |
分类号 |
C23C4/12;B05D1/08;C23C4/04;C23C4/18 |
主分类号 |
C23C4/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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