| 摘要 |
The present invention provides a polysilazane-treating solvent which has excellent dissolving power and stability, has no influence on a substrate as an underlying layer and the properties of a polysilazane, is excellent in shape of cut edge, and further has high safety to the human body. The treating solvent comprises a solvent selected from the group consisting of tetralin, p-menthane, p-cymene, alpha-pinene, 1,8-cineol, and mixtures thereof, and a polysilazane treatment method using the same. This solvent may further comprise a solvent selected from the group consisting of aliphatic hydrocarbons, alicyclic hydrocarbons, and mixtures thereof. |
