| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a contact probe pin that forms a carbon coating having electric conductivity and durability on a substrate whose tip is divided and that is capable of reducing Sn deposition as much as possible even under conditions where temperature is high in usage environment and keeping electric contact stable over a long period of time. <P>SOLUTION: In a contact probe pin where a tip is divided into two or more protrusions and the protrusions repeatedly contact a surface to be inspected, a carbon coating containing a metal and/or a carbide thereof is formed at least on surfaces of the protrusions, and a radius of curvature at an apex of the protrusion is 30 μm or more. <P>COPYRIGHT: (C)2012,JPO&INPIT |
