摘要 |
<P>PROBLEM TO BE SOLVED: To provide a current measurement apparatus which has a current measurement part consisting of a resistor, and surely improves the current measurement accuracy by reducing influences of inductance caused by high frequency current. <P>SOLUTION: The current measurement apparatus is configured that a first resistance part 121 is arranged at a first electrode 111 in an insulation layer so as to directly contact with the insulation layer, a second resistance part 131 is arranged at a second electrode 141 in the insulation layer so as to directly contact with the insulation layer, a first signal line 122 electrically connecting the first resistance part 121 to a voltage sensor for current measurement 102 and a second signal line 132 electrically connecting the second resistance part 131 to the voltage sensor for current measurement 102 are arranged symmetrically with respect to the insulation layer, the first signal line 122 is arranged on the same plane as the first resistance part 121, the second signal line 132 is arranged on the same plane as the second resistance part 131, and the voltage sensor for current measurement 102 detects a difference between resistance parts including a combination of the first resistance part 121 and the second resistance part 131. <P>COPYRIGHT: (C)2012,JPO&INPIT |