| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a compact light irradiation device for an exposure apparatus and capable of effectively preventing a lamp and a cover glass from being damaged when an impact is acted. <P>SOLUTION: The light irradiation device is provided with plural light sources 73, and a substantially rectangular cassette 81 supporting the plural light sources 73. At the cassette 81, an absorbing member 101 is disposed which absorbs an impact force applied to the cassette 81 and relaxes the impact force acting on the light source 73. <P>COPYRIGHT: (C)2012,JPO&INPIT |
