| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a spectroscopic sensor, thereby obtaining a spectroscopic sensor with high reliability. <P>SOLUTION: In a method for manufacturing a spectroscopic sensor 1, a cavity layer 21 is formed on a handle substrate by a nanoimprint method. The use of the nanoimprint method for the handle substrate enables the cavity layer 21 with high precision to be obtained stably. After the cavity layer 21, DBR layers 22 and 23 are formed on the side of a light-transmissive substrate 3, a light-detection substrate 4 is bonded. Accordingly, damage to the light-detection substrate 4 is prevented in each process to form the cavity layer 21, the DBR layers 22 and 23. <P>COPYRIGHT: (C)2012,JPO&INPIT |
