摘要 |
<P>PROBLEM TO BE SOLVED: To provide a novel method of manufacturing a thin film solar cell in which the number of laser material processing machines to be arranged in a manufacturing line can be decreased, and enhancement of power generation efficiency can be expected. <P>SOLUTION: After depositing a first electrode film 1, a power generation layer 2 and a second electrode film 3 on a substrate 0 so as to be superimposed, separation grooves 11, 21 which divide the laminated films 1, 2, 3 into cell units are formed. Subsequently, an insulator 6 is applied to the inside of the separation grooves 11, 21, and then the second electrode film 3 and the first electrode film 1 are insulated at one edges of the separation grooves 11, 21. Thereafter, a conductor 7 is applied to the inside of the separation grooves 11, 21, and then the second electrode film 3 at one edges of the separation grooves 11, 21 and the first electrode film 1 at the other edges of the separation grooves 11, 21 are short-circuited. <P>COPYRIGHT: (C)2012,JPO&INPIT |