发明名称 METHOD AND APPARATUS OF MANUFACTURING THIN FILM SOLAR CELL
摘要 <P>PROBLEM TO BE SOLVED: To provide a novel method of manufacturing a thin film solar cell in which the number of laser material processing machines to be arranged in a manufacturing line can be decreased, and enhancement of power generation efficiency can be expected. <P>SOLUTION: After depositing a first electrode film 1, a power generation layer 2 and a second electrode film 3 on a substrate 0 so as to be superimposed, separation grooves 11, 21 which divide the laminated films 1, 2, 3 into cell units are formed. Subsequently, an insulator 6 is applied to the inside of the separation grooves 11, 21, and then the second electrode film 3 and the first electrode film 1 are insulated at one edges of the separation grooves 11, 21. Thereafter, a conductor 7 is applied to the inside of the separation grooves 11, 21, and then the second electrode film 3 at one edges of the separation grooves 11, 21 and the first electrode film 1 at the other edges of the separation grooves 11, 21 are short-circuited. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012114404(A) 申请公布日期 2012.06.14
申请号 JP20110149375 申请日期 2011.07.05
申请人 KATAOKA SEISAKUSHO:KK 发明人 MATSUMOTO JUNICHI;YONEYAMA NOBUTAKA
分类号 H01L31/04 主分类号 H01L31/04
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