| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of an optical waveguide converting an optical path in an air interface of an inclined plane in a groove part, which can offer a sufficient mechanical strength and offer an inclined plane for optical path conversion with high credibility. <P>SOLUTION: A manufacturing method of an optical waveguide includes a step of forming a first cladding layer 20 on a substrate 10, a step of forming a core layer 22 on the first cladding layer 20, a step of forming a groove part 22x having an optical path conversion inclined plane S by processing the core layer 22 in a thickness direction, and a step of forming a second cladding layer 24 with an optical path conversion hole LH disposed on the optical path conversion inclined plane S, on the first cladding layer 20 and the core layer 22. <P>COPYRIGHT: (C)2012,JPO&INPIT |
