发明名称 COMPOSITION FOR COPPER FILM FORMING, AND METHOD OF MANUFACTURING COPPER FILM USING THE COMPOSITION
摘要 <P>PROBLEM TO BE SOLVED: To provide a solution type composition for forming a copper film, having a favorable coating property, having high preservation stability, convertible into the copper film at low temperatures, and capable of economically manufacturing the copper film that exhibits high conductivity. <P>SOLUTION: As an essential component, the composition for copper film forming contains 1 mol part of copper formate or hydrate thereof, 0.25-2.0 mol parts of at least one type of diol compound selected from a group consisting of diol compounds expressed either by the general formula (1) or by the general formula (1'), 0.25-2.0 mol parts of piperidine compound expressed by the general formula (2), and an organic solvent dissolving them. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012112022(A) 申请公布日期 2012.06.14
申请号 JP20100264007 申请日期 2010.11.26
申请人 ADEKA CORP 发明人 TAKAGI DAISUKE;YOSHINAKA ATSUYA;TOYODA SHOHEI
分类号 C23C18/08 主分类号 C23C18/08
代理机构 代理人
主权项
地址