White Light Optical Profilometer for Measuring Complex Surfaces

摘要

A white light optical profilometer having a measurement head that is separated from the base unit by means of a fiber optic bundle. The measurement head contains a Michelson objective, whose reference path is folded so that the measurement head may be compact. The measurement head also contains a tilting mirror, which directs light from the surface of interest to the objective, and may be adjusted to allow the measurement head to scan complex surfaces. The base unit contains the other elements of the profilometer, such as an image detector and illuminator.